JPS62114057U - - Google Patents

Info

Publication number
JPS62114057U
JPS62114057U JP107086U JP107086U JPS62114057U JP S62114057 U JPS62114057 U JP S62114057U JP 107086 U JP107086 U JP 107086U JP 107086 U JP107086 U JP 107086U JP S62114057 U JPS62114057 U JP S62114057U
Authority
JP
Japan
Prior art keywords
cluster
closed crucible
lid
substrate
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP107086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342033Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP107086U priority Critical patent/JPH0342033Y2/ja
Publication of JPS62114057U publication Critical patent/JPS62114057U/ja
Application granted granted Critical
Publication of JPH0342033Y2 publication Critical patent/JPH0342033Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP107086U 1986-01-10 1986-01-10 Expired JPH0342033Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP107086U JPH0342033Y2 (en]) 1986-01-10 1986-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP107086U JPH0342033Y2 (en]) 1986-01-10 1986-01-10

Publications (2)

Publication Number Publication Date
JPS62114057U true JPS62114057U (en]) 1987-07-20
JPH0342033Y2 JPH0342033Y2 (en]) 1991-09-03

Family

ID=30778631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP107086U Expired JPH0342033Y2 (en]) 1986-01-10 1986-01-10

Country Status (1)

Country Link
JP (1) JPH0342033Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012057235A (ja) * 2010-09-13 2012-03-22 Hitachi Zosen Corp 真空蒸着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012057235A (ja) * 2010-09-13 2012-03-22 Hitachi Zosen Corp 真空蒸着装置

Also Published As

Publication number Publication date
JPH0342033Y2 (en]) 1991-09-03

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